School of Electrical and Computer Engineering



 

Microfluidics

Schematic of novel combined photolithographic and imprint lithography process developed by Professor Cliff Henderson’s group that uses photodefinable thermally sacrificial polymers to fabricate microfluidic and MEMS devices.

Microfluidics: Microfluidics in general refers to systems which manipulate fluids in microchannels and microdevices ranging from nanometers to hundreds of microns in size. Typical fluid volumes elements that can be manipulated in such systems range in size from microliters to picoliters. One common name used for devices which handle fluids at these size scales is “lab-on-a-chip” devices. Such devices are already finding applications in a variety of areas including microchemical reactors systems, combinatorial materials synthesis and characterization, drug development and screening, genetic diagnostics and testing, and many other emerging areas. Microfluidics research in the School of Chemical & Biomolecular Engineering spans the full range of activities in the field of microfludics including (1) materials design, synthesis, and selection for device fabrication, (2) development of novel fabrication processes, (3) design and characterization of novel microfluidic systems, (4) use of microfluidic systems as research tools for studying a variety of phenomena in fields ranging from bioengineering to polymer reaction engineering, and (5) integration of microfluidic systems with other microelectronic and microelectromechanical systems (MEMS).

Current Studies

  • Development of photosensitive thermally sacrificial polymers and processes for microfluidic device fabrication
  • Use of novel fabrication techniques to build on-chip, multi-layered, interconnected microchannel networks and devices
  • Design, fabrication, and characterization of microfluidic fluid pumping devices
    Final cell/particle sorting device fabricated on silicon that contains ~0.25 meters of microfluidic channel structures and millions of sieving posts within the structure.
  • Design, fabrication, and characterization of microfluidic separation devices
  • Integration of microfluidic devices with CMOS integrated circuit (IC) technology
  • Development of materials and processes for the fabrication of microfluidic fuel cell systems
  • Development of materials and microfluidic devices for active cooling of microelectronic devices
  • Use of microfluidic systems for microrheological studies of complex fluids
  • Development of microfluidic devices for studying cell and organism behaviors in complex biological, chemical, and physical environments

Participating Faculty

 


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